An atmospheric pressure plasma source operated by radio frequency power has been developed. This source produces a unique discharge that is volumetric and homogeneous at atmospheric pressure with a gas temperature below 300°C. It also produces a large quantity of oxygen atoms, ϳ5ϫ10 15 cm Ϫ3 , which has important value for materials applications. A theoretical model shows electron densities of 0.2-2ϫ10 11 cm Ϫ3 and characteristic electron energies of 2-4 eV for helium discharges at a power level of 3-30 W cm Ϫ3 .

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