Barium titanate thin films were prepared by spin coating deposition technique
of an acetic precursor sol and sintered at 750, 900 and 1050?C. Phase
composition of the obtained thin films was characterized by X-ray diffraction
and Raman spectroscopy. Their morphology was analysed by scanning electron
microscopy and atomic force microscopy. Dielectric properties of thin films
sintered at 750 and 900 ?C were characterized by LCD device, where the
influence of sintering temperature on dielectric permittivity and loss
tangent was inspected. It was concluded that higher sintering temperature
increases grain size and amount of tetragonal phase, hence higher relative
permittivity was recorded. The almost constant relative permittivity in the
measured frequency (800Hz-0.5MHz) and temperature (25-200?C) ranges as well
as low dielectric loss are very important for the application of BaTiO3 films
in microelectronic devices. [Projekat Ministarstva nauke Republike Srbije,
br. III45021]
In this paper, barium titanate films were prepared by different deposition
techniques (spin coating, office Epson inkjet printer and commercial Dimatix
inkjet printer). As inkjet technique requires special rheological properties
of inks the first part of the study deals with the preparation of inks,
whereas the second part examines and compares structural characteristics of
the deposited films. Inks were synthesized by sol-gel method and parameters
such as viscosity, particle size and surface tension were measured. Deposited
films were examined by optical and scanning electron microscopy, XRD analysis
and Raman spectroscopy. The findings consider advantages and disadvantages of
the particular deposition techniques. [Projekat Ministarstva nauke Republike
Srbije, br. III45021]
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