Up to now, the light coupling schemes of germanium-on-silicon photodetectors (Ge-on-Si PDs) could be divided into three main categories: (1) vertical (or normal-incidence) illumination, which can be from the top or back of the wafer/chip, and waveguide-integrated coupling including (2) butt coupling and (3) evanescent coupling. In evanescent coupling the input waveguide can be positioned on top, at the bottom, or lateral to the absorber. Here, to the best of our knowledge, we propose the first concept of Ge-on-Si PD with double lateral silicon nitride ( Si 3 N 4 ) waveguides, which can serve as a novel waveguide-integrated coupling configuration: double lateral coupling. The Ge-on-Si PD with double lateral Si 3 N 4 waveguides features uniform optical field distribution in the Ge region, which is very beneficial to improving the operation speed for high input power. The proposed Ge-on-Si PD is comprehensively characterized by static and dynamic measurements. The typical internal responsivity is evaluated to be 0.52 A/W at an input power of 25 mW. The equivalent circuit model and theoretical 3 dB opto-electrical (OE) bandwidth investigation of Ge-on-Si PD with lateral coupling are implemented. Based on the small-signal (S21) radio-frequency measurements, under 4 mA photocurrent, a 60 GHz bandwidth operating at − 3 V bias voltage is demonstrated. When the photocurrent is up to 12 mA, the 3 dB OE bandwidth still has 36 GHz. With 1 mA photocurrent, the 70, 80, 90, and 100 Gbit/s non-return-to-zero (NRZ) and 100, 120, 140, and 150 Gbit/s four-level pulse amplitude modulation clear openings of eye diagrams are experimentally obtained without utilizing any offline digital signal processing at the receiver side. In order to verify the high-power handling performance in high-speed data transmission, we investigate the eye diagram variations with the increase of photocurrents. The clear open electrical eye diagrams of 60 Gbit/s NRZ under 20 mA photocurrent are also obtained. Overall, the proposed lateral Si 3 N 4 waveguide structure is flexibly extendable to a light coupling configuration of PDs, which makes it very attractive for developing high-performance silicon photonic integrated circuits in the future.
A high quantum efficiency (QE) and high-speed silicon nitride ( S i 3 N 4 ) waveguide coupled germanium-on-silicon photodetector (Ge-on-Si PD) is presented. The proposed device is fabricated in a commercial 90 nm silicon photonics process platform. By decreasing the spacing between the tapered S i 3 N 4 waveguide and the bottom Si to 200 nm and the S i 3 N 4 thickness to 300 nm, the QE is significantly improved. Although the theoretical responsivity can reach up to 0.92 A/W at 1550 nm, the measured value is calculated to be approximately 0.61 A/W. The maximum experimental responsivity is about 0.9 A/W at 1485 nm. The 3 dB optoelectrical bandwidth of up to 54 GHz is demonstrated at a − 3.3 V bias. Additionally, the 80, 90, 100, and 105 Gbit/s non-return-to-zero on-off-keying and the 150, 160, 170, and 180 Gbit/s four-level pulse amplitude modulation clear openings of the electrical eye diagrams are attained. Overall, the S i 3 N 4 -waveguide coupled Ge-on-Si PD in this work possesses higher QE and operates at the highest data rates reported so far.
We experimentally demonstrate a high-speed lateral PIN junction configuration germanium photodetector (Ge-PD) with 4-directional light input. The typical internal responsivity is about 1.23 A/W at 1550 nm with 98% quantum efficiency and dark current 4 nA at 1V reverse-bias voltage. The equivalent circuit model and theoretical 3-dB opto-electrical (OE) bandwidth of Ge-PD are extracted and calculated, respectively. Compared to the conventional lateral PIN Ge-PD with 1-directional light input, our proposed device features uniform optical field distribution in the absorption region, which will be benefit to realize high-power and high-speed operation. In particular, in the condition of 0.8 mA photocurrent, the measured 3-dB OE bandwidth is about 17 GHz at bias voltage of -8 V which is well matched to the theoretical estimated bandwidth. With additional digital pre-compensations provided by the Keysight arbitrary waveform generator (AWG), the root raised cosine (RRC) filter and roll-off factor of 0.65 are employed at transmitter (TX) side without utilizing any offline digital signal processing (DSP) at receiver (RX) side. The 50 Gbit/s, 60 Gbit/s, 70 Gbit/s, and 80 Gbit/s non-return-to-zero (NRZ), and 60 Gbit/s, 70 Gbit/s, 80 Gbit/s, and 90 Gbit/s four-level pulse amplitude modulation (PAM-4) clear opening of eye diagrams are realized. In order to verify the high-power handling performance in high-speed data transmission, we also investigate the 20 Gbit/s NRZ eye diagram variations with the increasing of photocurrent.
A light-trapping-structure vertical Ge photodetector (PD) is demonstrated. In the scheme, a 3 μm radius Ge mesa is fabricated to constrain the optical signal in the circular absorption area. Benefiting from the light-trapping structure, the trade-off between bandwidth and responsivity can be relaxed, and high opto-electrical bandwidth and high responsivity are achieved simultaneously. The measured 3 dB bandwidth of the proposed PD is around 67 GHz, and the responsivity is around 1.05 A/W at wavelengths between 1520 and 1560 nm. At 1580 nm, the responsivity is still over 0.78 A/W. A low dark current of 6.4 nA is also achieved at − 2 V bias voltage. Based on this PD, a clear eye diagram of 100 GBaud four-level pulse amplitude modulation (PAM-4) is obtained. With the aid of digital signal processing, 240 Gb/s PAM-4 signal back-to-back transmission is achieved with a bit error ratio of 1.6 × 10 − 2 . After 1 km and 2 km fiber transmission, the highest bit rates are 230 and 220 Gb/s, respectively.
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