Three-dimensional hierarchical ZnO films with lotus-leaf-like micro/nano structures were successfully fabricated via a biomimetic route combining sol-gel technique, soft lithography and hydrothermal treatments. PDMS mold replicated from a fresh lotus leaf was used to imprint microscale pillar structures directly into a ZnO sol film. Hierarchical ZnO micro/nano structures were subsequently fabricated by a 10 low-temperature hydrothermal growth of secondary ZnO nanorod arrays on the micro-structured ZnO film. The morphology and size of ZnO hierarchical micro/nano structures can be easily controlled by adjusting the hydrothermal reaction time. Wettability of hierarchical ZnO thin films was found to convert from superhydrophilicity to hydrophobicity after a low-surface-energy fluoroalkylsilane modification. Improved wetting properties from hydrophobic to superhydrophobic can be tuned by increasing the 15 growth of ZnO nanorods structures. 85 Notes and references

Hydrophobic inorganic films were obtained by direct deposition of copper or silicon onto natural lotus leaves by ion beam sputtering deposition technique. Scanning electron microscopy observations showed a lotus-leaf-like surface structure of the deposited inorganic films. Hydrophobic nature of the inorganic films on lotus leaves had been improved compared to the inorganic films deposited on flat silicon substrates.Water contact angles measured on the lotus-leaf-like copper and silicon films were 136.3 ± 8° and 117.8 ± 4.4°, respectively. The hydrophobic lotus-leaf-like inorganic films had been repeated used as nanoimprint stamps. Negative structures of lotus-leaf-like inorganic films were obtained on the polystyrene resist layers.

Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO sol and subsequent annealing process. The polymer-based ZnO sols were deposited on various substrates for the nanoimprint lithography and converted to surface-patterned ZnO gel films during the thermal curing nanoimprint process. Finally, crystalline ZnO films were obtained by subsequent annealing of the patterned ZnO gel films. The optical characterization indicates that the surface patterning of ZnO thin films can lead to an enhanced transmittance. Large-scale ZnO thin films with different patterns can be fabricated by various easy-made ordered templates using this combination of sol-gel and nanoimprint lithography techniques.