To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain criteria must be addressed. Aspects of resolution, cooling and hold time, count rates as well as vibrations are considered. Data is presented to the present efforts to handle these issues as well as discussing development plans for the future.
EDS Microanalysis has been performed on the Scanning Electron Microscope for over 30 years; the improvements in the hardware and software capabilities over the years have heralded many innovative ideas and solutions for microanalysis. The Si(Li) x-ray detector has long been the standard detector for x-ray microanalysis, other detectors have come along to try and remove it from the detector of choice, detectors such as Ge and WDS. Most recently the microcalorimeter and Silicon Drift Detector have brought new analytical capabilities to the material scientists.
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