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The kinetics of the deposition of polycrystalline silicon from silane were studied at 25-125 Pa and 863-963 K using a continuous flow perfectly mixed reactor equipped with a microbalance and a quadrupole mass spectrometer for in situ deposition rate measurements and on-line gas-phase analysis. It was possible to obtain rate coefficients that are intrinsic, i.e., only determined by chemical phenomena. A four-step elementary gas-phase reaction network coupled to a tenstep elementary surface network was able to describe the experimental data. Pressure falloff behavior of gas-phase reactions was taken into account using the Rice-Ramsberger-Kassel-Marcus theory. In the surface reaction mechanism, adsorption of silane, hydrogen, and highly reactive gas-phase intermediates and first-order desorption of hydrogen are the only kinetically significant steps. Silylene and disilane are the most abundant gas-phase intermediates, causing typically one fifth of the overall silicon growth.

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Polymeric micro‐ and nanoparticles have attracted a wide attention of researchers in various areas such as drug delivery, sensing, imaging, cosmetics, diagnostics, and biotechnology. However, processes with conventional equipment do not always allow a precise control of their morphology, size, size distribution, and composition. On the other hand, microreaction technology offers an improved control on the hydrodynamics, mass, and heat transfer, allowing the production of polymeric particles with better defined or new characteristics. Thus new horizons in polymer particle engineering arise from the use of microstructured or microfluidic devices. This article gives an insight into the latest developments and trends in the production of polymeric micro‐ and nanoparticles using microreaction technology directly from either monomers or polymer solutions.

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