A serious of nitride coatings including chromium, titanium and aluminum are deposited on the glass and stainless steel by Closed-Field unbalanced magnetron sputtering. The friction coefficient is measured by tribolometer and the wear traces of the coatings can be studied by the optical micrographs, those indicate that the friction coefficients of TiN、 CrN、TiAlN、CrAlN and CrTiAlN decrease sequentially as well as the anti-wear of the coatings can be enhanced. According to X-ray photoelectron spectroscopy analysis for the coatings, aluminum nitride can be indentified in the nitride coatings with Al element, which enhances the hardness and anti-wear performance of the coatings. The chrome oxide can be found in the nitride coatings with Cr element, which enhances the self-chip removal ability of the coatings and decreases the friction coefficients of the coatings; titanium oxide existing in the coatings is not good for the friction and anti-wear of the coatings. Chromium titanium aluminum nitride naturally is of higher hardness than the ternary nitride, as well as Chromium and aluminum in the coatings is in favor for the low friction coefficient and good anti-wear property.