This paper describes significant advancements to a low doped etch-stop technique which increases the differential etch rate of high doped to low doped silicon (Rh/I) by a factor of 4 or greater, to a value of up to 50: 1. The objective of the research was to achieve this increase in the differential etch rate by decreasing the etch rate of the low doped silicon epilayer, resulting in the development of an exceptional technique for rapid, safe, and high-quality etching of complex micro-structures. The technique has been confirmed by the production of devices. These include both 10pm thick diaphragms and a complete accelerometer structure, created from n on n+ epitaxial samples.
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