The polarization compensation of a Faraday rotator reflector was quantitatively measured while applying mechanical stress to an optical fiber. A novel device called a Faraday rotator transmitter was developed to illuminate a sample. It was confirmed that the installation of both a Faraday rotator reflector and a Faraday rotator transmitter in a fiber-optic interferometer greatly improves the accuracy of film thickness measurements compared with measurements obtained using an interferometer that employed polarization-maintaining optical fibers.
A novel profilometry using a waveguide-type frequency comb generator was presented. Thickness measurement of a glass plate was successfully demonstrated by sweeping comb interval frequency without mechanical scanning.
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