Oxygen vacancy behaviors in Ni-doped barium strontium titanate (BST) ceramics have been observed through thermally stimulated current (TSC) measurements up to 200°C. The set of observations confirmed that the vacancies drift due to a high electric field at an elevated temperature to pile up under the cathode electrode and the initial complex defects of acceptor, NiTi
′′, and donor, VO
••, are separated from each other forming a forward-biased pn junction. It is also revealed that the oxygen vacancies are newly generated at the anode area either if the ceramic surface is roughened or if a catalytic electrode such as Pt is attached.
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