Three-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been shown to have identical resolution and frequency responses in all directions. Here, a new and in-depth model of such accelerometers is presented. The theoretical model incorporates non-ideal effects such as the finite aspect ratio of the beam and the frequency-dependent squeezed gas-film damping. Sensitivity, resolution, transverse sensitivity and process errors are discussed. Prototype devices have been fabricated in a straightforward silicon process.
Different microelectromechanical system (MEMS) packaging strategies towards high packaging density of MEMS devices and lower expenditure exist both in the market and in research. For example, electrical interconnections and low stress wafer level packaging are essential for improving device performance. Hybrid integration of low temperature co-fired ceramics (LTCC) with Si can be a way for an easier packaging system with integrated electrical interconnection, and as well towards lower costs. Our research on LTCC-Si integration is reported in this paper.
Three-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been theoretically shown to have identical resolution and frequency responses in all directions. New simulation and models for this type of accelerometers have been developed and these are verified with measurements of the g-vector, shaker measurements and optical modal analysis. The measurements show good agreement with the new models. The results also show that the slanted-beam topology is a promising alternative for future three-axis accelerometer designs.
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