The lower pressure tendency in chemical mechanical polishing (CMP) process requires a lower adhesive inhibitor with environmentally friendly corrosion properties to replace the conventional benzotriazole (BTA) inhibitor for aluminum (Al) CMP. Open circuit potential test, potentiodynamic polarization curve test, linear sweep voltammetry and potential drop investigated by in-situ electrochemical mechanical polishing (ECMP) platform were used to reveal the controlled evolution process of corrosion inhibitor films at low pressure during Al CMP. The comparison between BTA and 1,2,4-triazole (TAZ) shows that TAZ has lower current density, wider potential inhibition interval, and high planarization efficiency, although TAZ has lower adhesion on Al surface. Finally, the surface roughness of Al after CMP with TAZ in weakly alkaline slurry at pressure of 1 psi was observed by atomic force microscopy (AFM) with a value of 0.19 nm. This studies demonstrated that the conventional BTA can be replaced by environmentally friendly corrosion inhibitor TAZ, which is a promising alternative candidate to the Al CMP at low down pressure.
In this study, the chemically bonded phosphate ceramic coatings (CBPCs) with different thickness (100 µm, 200 µm, and 300 µm) are prepared on the mild steel (Q235).
Potentiodynamic polarization testing and electrochemical impedance spectroscopywere carried out to study the synthetic effect of coating thickness and etching time (12,24,36, and 48 hours) on the corrosion behavior of CBPCs. The surface and cross section microstructure of CBPCs before and after different immersion time in 3.5 wt.% NaCl solution is investigated to better understand the corrosion behavior.Results revealed that the enhanced coating thickness can effectively postpone the corrosive factors infiltration into the substrate and prohibit the corrosion of the mild steel. From the potentiodynamic polarization testing results, the protection efficiency of the coating greatly increases with the increase in etching time. In addition, an increase in 10 000 and 1000 orders of magnitude of impedance value for the CBPCs with 12 hours and 48 hours etching time has been observed, respectively, indicating the CBPCs can effectively protect the mild steel from corrosion damage even with long-term service.
K E Y W O R D Schemically bonded phosphate ceramic coatings, coating thickness, corrosion performance, etching time, mild steel
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