The results of research the phase composition and electrophysical (resistivity, thermal coefficient of resistance, strain coefficient) and magnetoresistive properties (anisotropic magnetoresistance) of thin films (to 40 nm) high entropy alloys (HEA) based on Al, Cu, Ni, Cr, Fe, Co and Ti. It is established that after forming the layered samples by electron condensation on diffraction pattern fixed lines from the two phases of the fcc lattice and actually tracks the bcc phase. After homogenization by annealing the samples is one of the fcc phase s.s. HEA and traces bcc phase (likely s.s. (-Fe, Cr)), that samples are single phase. The study electrical properties allowed watching the first double-stage plastic deformation of a large value of the coefficient gauge (300 units), watch probably, is typical for НЕА. The character dependences MR from induction indicates to realization of anisotropic magnetoresistance.

The study of the structure-phase composition and electrophysical properties of film alloys of molybdenum and nickel or iron were deposited by the method of simultaneous thermo-vacuum condensation was done. In a non-annealing state, the samples remain biphasic. After heat treatment at 750 K in vacuum, the formation of the metastable phases of the fcc-Ni3Mo (lattice parameter a  0.360 nm) and bcc-Fe2Mo (a  0.296 nm) in film alloys based on Ni and Mo was recorded at concentrations of atoms of ferromagnetic metal 75 and 65 at.% respectively Investigation of the thermoresistive properties of films showed that the dispersion of the structure, the admixture phases and the solid phase reactions affect the temperature dependence of the resistivity and the temperature coefficient of resistance. In film alloys, the range of elastic deformation remains greater than several times than for single-layer metal films, while the strain coefficient is practically unchanged.

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