A compact helicon plasma source was developed as a millimeter-sized ion source for ion beam bioengineering. By employing a stacked arrangement of annular-shaped permanent magnets, a uniform axial magnetic flux density up to 2.8 kG was obtained. A cost effective 118 MHz RF generator was built for adjusting forward output power from 0 to 40 W. The load impedance and matching network were then analyzed. A single loop antenna and circuit matching elements were placed on a compact printed circuit board for 50 Ω impedance matching. A plasma density up to 1.1 × 10(12) cm(-3) in the 10 mm diameter tube under the magnetic flux density was achieved with 35 W applied RF power.
Although microwave induced plasmas are well known as high efficiency plasma sources, their uses in laboratories are limited since the microwave power systems are complicated and expensive. The output power of commercially available low-cost microwave ovens is fixed and discontinuous resulting from the high voltage doubler topology of the magnetron tube power supply. In this paper, a high voltage switched mode power supply of forward topology has been developed for continuous microwave power radiation. The forward converter can generate a no-load high voltage output maximum of 7 kV. When driving the magnetron tube, the microwave output power could be varied from 0 to 35 W while the high voltage output level was constantly regulated at -3.4 kV. A microwave induced plasma system was setup to investigate the plasma produced. A low pressure argon plasma was produced with only 2 W over a wide range of pressures.
High-voltage high-frequency power supply using voltage-fed load resonant inverter with a series-compensated resonant inductor has been developed for efficient atmospheric surface glow barrier discharges(ASGBD). It produces a controllable frequency and sinusoidal alternating voltage output. The maximum output voltage is about 6 kV peak to peak. Resonant power converter can be tune easily to the resonant frequency of the load. Operating frequency varies according to the load and voltage level typically in the range of 10 kHz and 1 MHz range. The output voltage is controlled by using pulse width modulation technique. The power supply developed in this paper is applied successfully for ozoniser that can produce high concentrate ozone by using ASGBD for agricultural industry applications.
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