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We present a high resolution study of the specularity of the atomic reflection from an evanescent wave mirror using velocity selective Raman transitions. We observed a double structure in the velocity distribution after reflection: a peak consistent with specular reflection and a diffuse reflection pedestal whose contribution decreases rapidly with increasing detuning. The diffuse reflection is due to two distinct effects: spontaneous emission in the evanescent wave and roughness in the evanescent wave potential whose amplitude is smaller than the de Broglie wavelength of the reflected atoms.

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