Laser micromachining of grooves having rectangular profile in stainless steel with high repetition rate femtosecond pulses was investigated. Wide range of process parameters, such as peak fluence (0.15-133 J/cm 2 ), pulse repetition rate (10-223 kHz), cumulative exposure dose, and liquid-assisted method for improving both machining efficiency and resultant structure quality was considered in order to provide understanding of underlying physical capabilities and limitations. Thereby the presence of optimal regimes for obtaining respectively maximum pulse energy utilization and maximum machining performance is proved. Logarithmic law of ablation rate for 400 fs laser pulses centred at 1030 nm with repetition rate of 25 kHz is confirmed for this type of machining.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.