ABSTRACT:Slot coating has been widely spread in photo resist coating on glass for flat display monitor. High quality of coating is required as high quality of image in display is needed. Coating quality in the slot coating is divided into nozzle direction quality and machine direction quality. Nozzle direction quality is related to flow uniformity inside the die whereas machine direction quality is related to die lip design and operational conditions. In this study coating uniformity in the machine direction of slot coating has been investigated through computer simulation. Die lip angle and die lip length were considered as outside die geometry and coating speed was considered as operational condition. Coating behavior has been analyzed and coating quality has been evaluated through computer simulation. Coating thickness decreased and coating uniformity increased as coating speed increased. However, the stability of meniscus formation was reduced and subsequently coating stability was reduced as coating speed increased. Coating thickness deviation decreased as die lip angle increased in down stream die. Coating thickness decreased and time to reaching steady state increased as increased die lip length in down stream die.
As a process of plat panel display production, slot coating is widely used for the coating of photoresist on a wide glass substrate. A uniform coating thickness is important, and the coating uniformity is divided into nozzle and machine directions. The machine and nozzle directions coating uniformities are influenced by the operation condition of coater and flow uniformity inside the die, respectively. Non-uniform coating during steady coating process occurs according to those factors, however, non-uniform coating along the machine and nozzle directions has been observed at the beginning of coating by unsteady flow. In this study, steady and unsteady state flow simulations have been performed and compared with experiment to examine the causes of non-uniform coating. Computational results exhibited that it took a time to get a uniform pressure distribution at whole inside the die, and during this period of time edge regions showed lower exit velocity compared with center region. Subsequently edge regions had thinner coated layers than center region. However edge regions showed higher exit velocity than center region after steady state, and this made edge regions had thicker coated layer than center region.
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