Because scanning probe microscopes produce three-dimensional data of almost any solid they have a strong potential as metrological tools. Results are presented from the first international intercomparison between four national metrology laboratories. On three-dimensional calibration standards the mean deviations between instruments were typically Ͻ2% in the x direction, Ͻ5% in the y direction, and Ͻ10% in the z direction. Eight samples were circulated for roughness measurements and 19 roughness parameters were calculated for each image. In the range where the scanning probe microscope measurements overlapped with classical techniques ͑profilometers͒ the agreement was good. Also a gauge block of hardened steel ͑Ϸ900 HV͒ with an array of Vickers indentations having diagonal lengths ranging from 3 to 60 m was circulated and measured.
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