We report electrical measurements on four different metal contacts which formed Schottky barriers to lightly doped complementary n-and p-type Alo.,,Ino.,2 As epitaxial material grown by molecular beam epitaxy on semi-insulating InP substrates. The Schottky contact metals studied were Au, Al, Pt, and the tri-layer Ti/Pt/Au. The Schottky barrier heights varied from 0.560 eV for A1 on n-type AlInAs to 0.905 eV for Al on p-type AlInAs, with intermediate values for the other metals studied. The sum of the n-and p-type Schottky barrier heights for each metal contact ranged from 1.440 to 1.465 eV, in good agreement with the accepted A1,.,InO.,,As bandgap value of 1.45 eV.ATTICE-matched AlInAs/InGaAs/InP devices are very L attractive for high-speed, high-frequency transistor applications [ 11 - [3]. As such, the characteristics of Schottky barriers to AlJn, -,As ( x = 0.48) are of fundamental interest for device applications. AlInAs epitaxial layers have been the subject of numerous investigations in the last decade [ 11 -[ 121. These studies have included AlInAs energy bandgap dependence on alloy composition by optical methods [4]; growth and characterization of MBE-grown AlInAs [5]; photoemission studies [6]; AlInAs Schottky barrier height compositional dependence work [7]; further investigations of the Schottky barrier height of AlInAs [8] -[ 101 ; and barrier height studies [ll], [12]. Similar work on the Schottky barrier height of AlGaAs has also been performed [ 131.In this work we present new data on the fundamental electronic properties of the Schottky barrier height of complementary p-and n-type A10,481n0,52 As Schottky barriers grown by molecular beam epitaxy. The n-type and p-type A10,4,1no,5, As samples consisted of a 3000-8, heavily doped 1 X 1019 cm-3 buried ohmic contact layer followed by approximately 4000 8, of a lightly doped surface layer. The group 111 fluxes were calibrated using W E E D intensity oscillations and the layers were determined to be within f 1 % of lattice-matched composition using double-crystal X-ray diffraction. The uniform low doping concentration for both the p-and n-type Alo,481no,52As samples was chosen to be roughly 2 X 10l6 ~m -~, and was determined by capacitance versus voltage ( C V ) measurements to be approximately 1.4 x 10l6 cm-3 f 3% and 2.4 x 10l6 cm-3 f 2% for the . Streit are with TRW, Inc., Redondo Beach, CA IEEE Log Number 9104126.Engineering, University of Utah, Salt Lake City, UT 84112.
92072.w n + or p + InAlAs ( 1 00) InP Substrate Fig. 1. Device structure of Alo,481no,52 As samples.p-and n-type devices, respectively. The 4.15-mil-diameter metal dots were evaporated following a 7-mil-diameter mesa etching to expose the buried heavily-doped layer. An illustrative schematic of the device structure is shown in Fig. 1.One benefit of studying complementary p-and n-type Schottky devices is that the sum of the Schottky barrier heights, 4, and +n, should be equal to the energy bandgap E, of the semiconductor material [13]- [15]. This equality is known as the barrier heig...