Photonic quantum technologies hold promise to repeat the success of integrated nanophotonic circuits in non-classical applications. Using linear optical elements, quantum optical computations can be performed with integrated optical circuits and can therefore overcome the existing limitations in terms of scalability. In addition to passive optical devices for realizing photonic quantum gates, active elements, such as single-photon sources and single-photon detectors, are essential ingredients for future optical quantum circuits. Material systems that allow for the monolithic integration of all components are particularly attractive, including III-V semiconductors, silicon and diamond. Here, we demonstrate nanophotonic integrated circuits made from high-quality polycrystalline diamond thin films in combination with on-chip single-photon detectors. By using superconducting nanowires that are coupled evanescently to traveling waves, we achieve high detection efficiencies of up to 66% as well as low dark count rates and a timing resolution of 190 ps. Our devices are fully scalable and hold promise for functional diamond photonic quantum devices.
Abstract-This letter describes the procedure to manufacture high-performance surface acoustic wave (SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz. In the design of SAW devices on AlN/diamond systems, the thickness of the piezoelectric layer is a key parameter. The influence of the film thickness on the SAW device response has been studied. Optimized thin films combined with advanced e-beam lithographic techniques have allowed the fabrication of one-port SAW resonators with finger width and pitch of 200 nm operating in the 10-14 GHz range with up to 36 dB out-of-band rejection.Index Terms-AlN/diamond, surface acoustic wave (SAW) resonator, super-high-frequency band, thickness influence.
Nanopores in insulating solid state membranes have recently attracted much interest in the field of probing, characterizing, and manipulating single linear polymers such as DNA/RNA and proteins in their native environment. Here a low cost, fast, and effective way to produce nanostructures such as pyramidal shaped nanopores and nanochannels with dimensions down to about 15 nm in diamond membranes without any need for electron-beam lithography is demonstrated. By use of a catalytic process, anisotropic etching of diamond with self-organized Ni nanoparticles in hydrogen atmosphere at 900 degrees C is achieved and possible etching mechanisms are discussed. It is shown that diamond planes with the crystallographic orientation of [111] are etched slowest with this method
Diamond integrated photonic devices are promising candidates for emerging applications in nanophotonics and quantum optics. Here, we demonstrate active modulation of diamond nanophotonic circuits by exploiting mechanical degrees of freedom in free-standing diamond electro-optomechanical resonators. We obtain high quality factors up to 9600, allowing us to read out the driven nanomechanical response with integrated optical interferometers with high sensitivity. We are able to excite higher order mechanical modes up to 115 MHz and observe the nanomechanical response also under ambient conditions
Nanocrystalline diamond (NCD) membranes of 150 nm thickness and diameters in the millimeter range grown by microwave-assisted chemical-vapor deposition were bulged to investigate their mechanical properties and their use as tuneable optical lenses. The NCD films were grown at different CH(ind 4)/H(ind 2) gas mixtures to vary the sp(exp 2)/sp(exp 3) ratio and thereby to tune their mechanical, optical, and surface morphology properties. By applying gas over pressure the membrane forms a lens shaped geometry. From deflection data we calculated Young's moduli which decrease with increasing CH(ind 4)/H(ind 2) ratio from 1160 GPa at 0.5% to 900 GPa at 7%. Optical lens applications show a variation in the focal point from infinity to 3.5 mm. The data indicate that NCD is a promising material for tuneable optical lenses applications
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