A bright ion source based on the solid electrolyte (AgI)0.5(AgPO3)0.5 has been developed. The solid electrolyte source provides stable currents of Ag+ in the microampere regime that make it suitable for focused ion beam applications. Similar conditions are expected for different solid electrolyte materials and their corresponding ions. This opens a broad field of applications in structuring and modifying devices on a nanometer scale using focused ion beams.
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