A zinc oxide thin film transistor is developed and optimized that simultaneously functions as a transistor and a force sensor, thus allowing for scalable integration of sensors into arrays without the need for additional addressing elements. Through systematic material deposition, microscopy, and piezoelectric characterization, it is determined that an O2 rich deposition condition improves the transistor performance and pressure sensing characteristics. With these optimizations, a sensitivity of 4 nA kPa−1 and a latency of below 1 ms are achieved, exceeding the criteria for successful commercialization of arrayed pressure sensors. The functionality of 16 × 16 pressure sensor arrays on thin bendable glass substrates for integrated low weight and flexible touchscreen displays is fabricated and demonstrated and read‐out electronics to interface with the arrays and to record their response in real‐time are developed. Finally, the application of these sensors for mobile displays via their operation with an existing commercial touch integrated circuit controller is demonstrated.
Transistors
are the backbone of any electronic and telecommunication
system but all known transistors are intrinsically nonlinear introducing
signal distortion. Here, we demonstrate a novel transistor with the
best linearity achieved to date, attained by sequential turn-on of
multiple channels composed of a planar top-gate and several trigate
Fin field-effect transistors (FETs), using AlGaN/GaN structures. A
highly linearized transconductance plateau of >6 V resulted in
a record
linearity figure of merit OIP3/PDC of 15.9 dB at 5 GHz
and a reduced third-order intermodulation power by 400× in reference
to a conventional planar device. The proposed architecture also features
an exceptional performance at 30 GHz with an OIP3/PDC of
≥8.2 dB and a minimum noise figure of 2.2 dB. The device demonstrated
on a scalable Si substrate paves the way for GaN low noise amplifiers
(LNAs) to be utilized in telecommunication systems, and is also translatable
to other material systems.
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