Two-dimensional
(2D) layered materials are ideal for micro- and
nanoelectromechanical systems (MEMS/NEMS) due to their ultimate thinness.
Platinum diselenide (PtSe2), an exciting and unexplored
2D transition metal dichalcogenide material, is particularly interesting
because its low temperature growth process is scalable and compatible
with silicon technology. Here, we report the potential of thin PtSe2 films as electromechanical piezoresistive sensors. All experiments
have been conducted with semimetallic PtSe2 films grown
by thermally assisted conversion of platinum at a complementary metal–oxide–semiconductor
(CMOS)-compatible temperature of 400 °C. We report high negative
gauge factors of up to −85 obtained experimentally from PtSe2 strain gauges in a bending cantilever beam setup. Integrated
NEMS piezoresistive pressure sensors with freestanding PMMA/PtSe2 membranes confirm the negative gauge factor and exhibit very
high sensitivity, outperforming previously reported values by orders
of magnitude. We employ density functional theory calculations to
understand the origin of the measured negative gauge factor. Our results
suggest PtSe2 as a very promising candidate for future
NEMS applications, including integration into CMOS production lines.
Ultrasonic guided waves have been used successfully in structural health monitoring systems to detect damage in isotropic and composite materials with simple and complex geometry. A limitation of current research is given by a lack of freely available benchmark measurements to comparatively evaluate existing methods. This article introduces the extendable online platform Open Guided Waves ( http://www.open-guided-waves.de ) where high-quality and well-documented datasets for guided wave-based inspections are provided. In this article, we describe quasi-isotropic carbon-fiber-reinforced polymer plates with embedded piezoelectric transducers as a first benchmark structure. Intentionally, this is a structure of medium complexity to enable many researchers to apply their methods. In a first step, ultrasound and X-ray measurements were acquired to verify pristine conditions. Next, mechanical testing was done to determine the stiffness tensor and sample density based on standard test procedures. Guided wave measurements were divided into two parts: first, acoustic wave fields were acquired for a broad range of frequencies by three-dimensional scanning laser Doppler vibrometry. Second, structural health monitoring measurements in the carbon-fiber-reinforced polymer plate were collected at constant temperature using a distributed transducer network and a surface-mounted reversible defect model. Initial results serving as validation are presented and discussed.
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