This paper presents an accurate millimeter-wave attenuation measurement system in 140GHz-220GHz range. Based on the intermediate-frequency (IF) series substitution method, this measurement system employs an inductive voltage divider (IVD) working at 10 kHz as a reference standard. By stabilizing the IF measurement signal with a new reference signal generating technique, the system can get a pretty good stability just like shown in related figures. The validity of new system gets proved by comparing its measurement results with another dualchannel IF substitution system's results, which is a national metrology standard with 2 GHz substitution frequency. The achievable calibration accuracy and its measurement uncertainty evaluation are also analyzed and discussed in this paper.
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