There are two common methods in generating magnetic resonance in FMs for spin pumping, cavity FMR and microstrip waveguides [3,7,8,12,19]. FMR cavities produce modest-strength, uniform rf fields over a relatively large space (cm-scale); while microstrip waveguides produce rf fields typically in micron to sub-mm scale, and when made very close to the FMs, can generate fairly large h rf [12,19]. Since the magnitude of rf field determines the excitation strength for spin pumping and only a few reports on microstrip spin pumping presented values of h rf [12,19], in this letter, we mainly compare our results with previous reports of spin pumping using cavity FMR. respectively, which reach the resolution limit of conventional high-resolution XRD systems, demonstrating excellent crystalline quality. In this letter, we focus on two 20-nm YIG films (YIG-1 and YIG-2) for FMR and spin pumping measurements.Room-temperature FMR measurements of the YIG films are carried out in a cavity at a microwave frequency f = 9.65 GHz and power P rf = 0.2 mW. Figure 3e shows the angular dependence of V ISHE for Pt/YIG-1 and W/YIG-2 normalized by the maximum magnitude of V ISHE at θ H = 90°.The clear sinusoidal shape is characteristic of ISHE since [15]thus confirming that the observed ISHE voltage arises from FMR spin pumping. The spin pumping signals we observed in insulating YIG cannot be explained by artifacts due to thermoelectric or magnetoelectric effects, such as anisotropic magnetoresistance (AMR) or anomalous Hall effect (AHE) [13,16,32,34,35].While a spin current is generated by transfer of angular momentum from YIG to metal, simultaneously, the coupling between YIG and metal exerts an additional damping to the magnetization precession in YIG, resulting in increased linewidths [10,12], as shown in Fig. 5 4 for the three samples before (∆H 0 ) and after (∆H 1 ) the deposition of where G r , γ, and B are the real part of spin mixing conductance, the gyromagnetic ratio, factor and Bohr magnetron, respectively. Using Eq. (2), we obtain = 4.56× 10 14 and 2.30× 10 14 Ω -1 m -2 for Pt/YIG-2 and W/YIG-2, respectively, which agree with the theoretical calculations [36] and are among the highest of reported experimental values [3,5,8,9].Previously, spin pumping of Pt/YIG excited by similar cavity FMR gave ISHE voltages in the µV range [1,9,11,16]. The large spin pumping signals and high spin mixing conductance observed in our YIG films may be attributed to two possible reasons. First, the small thickness (20 nm) of our films compared to LPE films (100 nm or larger) may play an important role, as suggested by a recent report [7] that a 200-nm YIG film shows much higher spin pumping efficiency than 1-µm and 3-µm films excited by a microstrip waveguide. [7,12]. Further investigation of spin pumping in these thin YIG films using microstrip waveguides will access larger dynamic range of spin pumping. In addition, the mV-level ISHE voltages reported here using a moderate h rf will allow miniaturization of spin pumping structures while m...