Surface plasmons, a unique property of metal nanoparticles, have been widely applied to enhance the performance of optical and electrical devices. In this study, a high quality zinc oxide (ZnO) thin film was grown on a quartz substrate by a radio frequency magnetron sputtering technique, and a metal-semiconductor-metal structured ultraviolet detector was prepared on the ZnO film. The responsivity of the photodetector was enhanced from 0.836 to 1.306 A/W by sputtering metal (Pt) nanoparticles on the surface of the device. In addition, the absorption of the ZnO thin film was enhanced partly in the ultraviolet band. It is revealed that Pt nanoparticles play a key role in enhancing the performance of the photodetectors, where surface plasma resonance occurs.

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We report on the ultraviolet photodetectors based on the MgZnO/ZnO and ZnO/MgZnO double-layer films prepared by magnetron sputtering method. The spectral response shows only one responsivity peak in the 1.0 and 1.5 h photodetectors (denoted by the deposition time of one layer of the films) and two peaks in the 0.5 h photodetectors. To our surprise, the Au/MgZnO/ZnO photodetectors have larger responsivity than that of the Au/ZnO/MgZnO ones. A physical mechanism focused on depletion width is given to explain the above results.

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