A silicon-based and fully integrated micro-proton exchange membrane fuel cell (μ-PEMFC) which carries out high efficient catalyst utilization and outstanding cell performance is introduced in this paper. The novel design involves the integration of micro-and nano-structures that leads to higher reaction rate due to larger surface areas, reduced impedance of fuel diffusion due to micro-patterned reaction chamber that creates extra three-phase zones, and improved interfacial strength and reduced ohmic impedance due to micro-interlocks of a single cell. The best performance in the current study is 26 mW/cm 2 with only 0.69 mg/cm 2 of Pt catalyst, and it is superior to the present micro-fuel cells after normalizing Pt loading.
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