Solid state electrochemical and chemo-resistive gas sensors have been used widely but can operate only under high temperature. For reducing the power consumption and optimizing the structure of the substrate of these sensors, we conducted device and circuit simulations using the COMSOL Multiphysics simulator. For assessing the effective types of substrate and heat isolation, we conducted three-dimensional thermal simulations in two separate parts; (a) by changing the shape of the contacting holes and (b) punching additional holes on the substrate. Thus, it was possible to achieve high temperature in the sensor end of the substrate while maintaining low power consumption, and temperature in the circuit.
CO 2 sensor was used only one solid electrolyte in many cases. To improve the sensing characteristics of CO 2 sensors, solid electrolyte CO 2 sensor has been developed by bi-electrolyte type sensor using Na-Beta-alumina and YSZ. However, in many further studies, bielectrolyte type sensor was made by pellet pressed by press machine and additional treatment for formation of interface. In the aspect of mass production, using thick film and additional treatment is not suitable. In this study, CO 2 sensor was fabricated by bi-electrolyte structure which was made by an NBA paste layer deposited on YSZ pellet and fired at 1650 o C for 2 hour. The formation of stable interface between YSZ and NBA were confirmed by SEM image. When the type IV electrochemical cell arrangement represented by CO 2 ,O 2 ,Pt| Li 2 CO 3 -CaCO 3 ||NBA||YSZ|O 2 ,Pt is used to measure the CO 2 concentration in air. This sensor EMF should depend only on the concentration of CO 2 by logarithmic. Also, sensor shows P CO 2 and EMF relationship like nerstian reaction at a temperature of 450 o C.
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