In accompany with the technique of semiconductor fabrication development, the ultraviolet (UV) sensor with specific wavelength absorption is worthy to investigate. This study realized a highly-sensitive UV sensing system based on a ZnO/LiNbO 3 hybrid surface-acoustic-wave (SAW) device, where ZnO is used as UV sensing material. The system includes a ZnO based SAW oscillator, a local oscillator, a Mixer, a frequency to voltage (F/V) converter, an analog to digital (A/D) converter, and a liquid crystal display interface. The ZnO UV sensor is characterized for its functional performance under different intensities of UV illumination. Experimental results show that the frequency shift of the SAW oscillator output exhibit a linear variation with UV light intensity. The low level UV intensity can be easily detected.
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