Platinum nano particles dispersed tungsten trioxide (Pt/WO 3 ) is a promising hydrogen gas sensor material which can detect it by the change of color. Hydrogen gas sensing properties of Pt/WO 3 thin film strongly depend on its film structure. Particularly, the porosity and the particle size of WO 3 are very important for obtaining good hydrogen sensitivity. The morphology of Pt/WO 3 thin film prepared by solgel process can be modified by the heat-treatment temperature and the Ti-doping to WO 3 . Pt/WO 3 thin films consisting of small particles and porous structure were obtained by Ti-doping. Especially, Ti-doping was very effective to obtain the small WO 3 particle in spite of a high temperature heat treatment. It was considered that Ti-doping produced oxygen vacancy in WO 3 lattice and this disturbed the densification of the film and the grain growth of WO 3 . This sample showed a good response to hydrogen gas exposure, compared with that of non-doped sample. Therefore, it was found that the surface modification by Ti-doping can enhance the optical hydrogen gas sensing property of Pt/WO 3 .
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