The reaction conditions for the synthesis of Cu-BTC (BTC = benzene-1,3,5-tricarboxylic acid) were elucidated using a continuous-flow microreactor-assisted solvothermal system to achieve crystal size and phase control. A high-rate synthesis of Cu-BTC metal-organic frameworks with a BET surface area of more than 1600 m(2) g(-1) (Langmuir surface area of more than 2000 m(2) g(-1)) and with a 97% production yield could be achieved with a total reaction time of 5 minutes.

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Surface-enhanced infrared absorption (SEIRA) is capable of identifying molecular fingerprints by resonant detection of infrared vibrational modes through the coupling with plasmonic modes of metallic nanostructures. However, SEIRA for on-chip gas sensing is still not very successful due to the intrinsically weak light-matter interaction between photons and gas molecules and the technical challenges in accumulating sufficient gas species in the vicinity of the spatially localized enhanced electric field, namely, the "hot-spots", generated through plasmonics. In this paper, we present a suspended silicon nitride (SiN) nanomembrane device by integrating plasmonic nanopatch gold antennas with metal-organic framework (MOF), which can largely adsorb carbon dioxide (CO) through its nanoporous structure. Unlike conventional SEIRA sensing relying on highly localized hot-spots of plasmonic nanoantennas or nanoparticles, the device reported in this paper engineered the coupled surface plasmon polaritons in the metal-SiN and metal-MOF interfaces to achieve strong optical field enhancement across the entire MOF film. We successfully demonstrated on-chip gas sensing of CO with more than 1800× enhancement factors by combining the concentration effect from the 2.7 μm MOF thin film and the optical field enhancement of the plasmonic nanopatch antennas.

Metal–organic frameworks (MOFs) have been of great interest for their outstanding properties, such as large surface area, low density, tunable pore size and functionality, excellent structural flexibility, and good chemical stability. A significant advancement in the preparation of MOF thin films according to the needs of a variety of applications has been achieved in the past decades. Yet there is still high demand in advancing the understanding of the processes to realize more scalable, controllable, and greener synthesis. This review provides a summary of the current progress on the manufacturing of MOF thin films, including the various thin-film deposition processes, the approaches to modify the MOF structure and pore functionality, and the means to prepare patterned MOF thin films. The suitability of different synthesis techniques under various processing environments is analyzed. Finally, we discuss opportunities for future development in the manufacturing of MOF thin films.