As a type of optical measuring apparatus, the charge-coupled diode (CCD) camera provides the capability of increasing the speed of measurement by inspecting an area with only one shot. However, the CCD camera's high-variation range of reflectivity presents an exceptional challenge for the optical measurement established on the surface. We present a method that could enable one to acquire an image with a highdynamic range in one shot without any reduction in spatial resolution. Because of the sufficient signal-to-noise ratio, the method presented could perform the robustness of the phase-retrieving algorithm, and the surface topography could be measured more accurately.
We developed a telecentric 3D measurement system based on the fringe projection technique to measure phases corresponding to the 3D shape of bumps on a surface. A measurement algorithm based on an area scan camera with a flexibly programmable region of interest (ROI) was applied to reconstruct the 3D model. Only the pixel information within the ROI is stored, which reduces the data volume and processing and accelerates the area scan acquisition. Experiments showed that the fringe projection system provided good linearity between the calibration and optical data with excellent accuracy. A reflectometry sensor was implemented to provide a correction offset to the bump height in a protection layer in a subsequent high-speed inspection.
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