As a basic optical element, optical lens is widely used for realizing the focusing, imaging and optical communication systems. Light of different wavelengths will propagate at different speeds. A beam of polychromatic light will produce chromatic dispersion after passing through a single optical device, which prevents the ordinary lenses from focusing the light of different wavelengths into a point. This means that the light of different wavelengths cannot be focused ideally. Traditional focusing systems can solve this problem by superimposing multiple lenses, but this is at the expense of increasing the complexity, weight, and cost of the system, and is not suitable for highly integrated nano-optical systems. At present, a better solution is to use the plane metalens, that is, using the metasurface to control the amplitude, phase and polarization at each point in space. However, the plane metalens is difficult to directly integrate on the chip. An intelligent algorithm developed by combining finite element method with genetic algorithm is used to optimize the design of multi-channel on-chip wavelength router devices and polarization router devices. In this paper, combining with years’ research results of the theory of multiple scattering coherent superposition of disordered media, the use of intelligent algorithm to design an on-chip integrated nano-lens that can achieve efficient focusing from the visible to the near infrared band. In the lens structure SiO<sub>2</sub> serves as a substrate, and the arrangement structure of SiC rectangular column is designed. The substrate size is only 2 μm × 2 μm. The lens achieves low-dispersion focusing in the band from 470 nm to 1734 nm, with a focusing efficiency of over 55% at the highest level and 30% at the lowest level, and an average focusing efficiency of 42.1%. A 200-nm waveguide is added behind the focusing region. After refocusing through the waveguide, the laser beam with a size of 2 μm can be focused by the coupling of the lens and the waveguide into a beam below 200 nm in size. The focusing efficiency goes up to 80%. At the same time, the intelligent algorithm can be applied to different types of structures. The focusing lens structures composed of triangle, diamond, or circular nano columns are designed, which can achieve an approximate focusing effect and efficient coupling propagation efficiency. This work provides important ideas for developing broadband and efficient focusing nano-lens, as well as a new way to achieve the high-density integrated nanophotonic devices.
Photonic chip is a kind of integrated device that uses light as a carrier for information transportation and processing. Owing to its advantages of small size, lightweight, and low power consumption, photonic chip has become the most popular research topic nowadays. The beam splitter is a vital part of on-chip integration. For conventional beam splitting elements, Y-type and tree-branch output are the main elements, which are usually realized by interference principles. However, it is appropriate only for simple conventional beam splitter because the propagation direction of light cannot achieve large angle deflection. In the case of relay loading, optical amplification, pumping, and frequency upconversion, the vertical loading is often required without affecting the main optical path. To complete the large-angle deflection beam splitting, one needs to add a mirror to realize it or use a right-angle mirror structure for geometric double-sided reflection and splitting in traditional ways, but these structures are relatively complicated and difficult to complete on-chip integration. Based on previous work on inversely designed multi-channel wavelength routers and wide spectrum efficient focusing devices by using the intelligent algorithm, and combining the years of research on the coherent superposition theory of multi-scattering of the disordered medium, a large angle beam splitter that can realize from the near-infrared band is designed through using the intelligent algorithm. The beam splitter structure is based on AMTIR-1 glass, the part to be etched is air. The composition of AMTIR-1 is Ge<sub>33</sub>As<sub>12</sub>Se<sub>55</sub>. And the size of the structure is only 1 μm × 2 μm. The beam splitter can achieve 180° linear separation of beams in a range from 800 nm to 1100 nm, the beam splitting ratio of the entire waveband is approximately 1∶1, and the gross beam splitting efficiency is stable between 85% and 92%. Compared with several conventional structures with the same size, the efficiency of the beam splitter designed by this algorithm is higher. At the same time, the algorithm has the advantages of fast computation speed and small computation amount, and it can be completed only by ordinary personal computers without the support of hardware such as workstations. This intelligent algorithm can also be applied to the design of various passive photonic devices such as optical polarization splitters, routers, optical isolators, etc., providing an idea and reference for the design of integrated micro-nano photonic devices on high-density sheets.
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