In this report, plasma heating mode transitions at different pressures in an inductively coupled plasma source are investigated. Results show that the plasma properties abruptly change as the mode transition occurs at pressures where the electron–neutral particle collision frequency is higher than the wave frequency while they slowly vary at the low-pressure side. Additionally, the electron energy distribution function changes from a Druyvesten to a Maxwellian distribution in mode transitions at high pressure.

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Recently, an optical scanning holographic system with a polarization directed flat lens was proposed to realize coaxial scanning holography (CSH). The advantage of CSH is its small form factor and the stability. However, the diffraction efficiency of the polarization directed flat lens cannot be 100%, and thus there is always zeroth order light in the scanning beam. The imperfect diffraction property of the polarization directed flat lens results in an incomplete scanning Fresnel zone plate. Consequently, the reconstructed image is blurred and noisy. In this paper, we compared different methods, including the back propagation, the phase correlation, and inverse filtering, for the hologram reconstruction. It is demonstrated that inverse filtering is the only method that can retrieve the high-frequency component of the hologram. However, additional noise also arises with the use of inverse filtering. Therefore, the imaging performance of CSH by using a polarization directed flat lens is inherently worse than that of conventional OSH.

We present an in-depth discussion on the subband Boltzmann transport (SBTE) methodology, its evolution, and its application to the simulation of nanoscale MOSFETs. The evolution of the method is presented from the point of view of developing a commercial generalpurpose SBTE solver, the GTS nano device simulator (NDS). We show a wide range of applications SBTE is suited for, including state-of-the-art nonplanar and well-established planar technologies. It is demonstrated how SBTE can be employed both as a path-finding tool and a fundamental component in a DTCO-flow.

The binary computer-generated hologram (BCGH) has attracted much attention recently because it can address the high-speed binary spatial light modulator (SLM), such as a digital micromirror device (DMD) SLM. In this paper, our concern is the development of an algorithm to produce high-quality BCGHs. In particular, simulated annealing (SA) is an efficient algorithm used to produce a phase-only computer-generated hologram. In the study of SA for the production of a BCGH, we found some inherent shortcomings of SA, and the quality of the produced BCGHs is limited. Accordingly, we have modified SA and propose the simulated-annealing binary search (SABS) algorithm. We have also proposed a method to quickly determine the parameters for SABS. In the comparison with SA, the mean square error of the SABS BCGHs decreases by 32% on average. Therefore, the SABS is a promising technique for a high-quality holographic display by DMD.