Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.
Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Moreover, differences in the absolute reflectivity of the interfaces before and after coating reveal the formation of interstitial diffusion and oxidation layers at the Al-Cu and Al-SiO2 boundaries. Finally, we show that EUV CDI provides a unique capability for quantitative, chemically-specific imaging of buried structures, and the material evolution that occurs at these buried interfaces, compared with all other approaches.
Topological magnetic monopoles, also known as hedgehogs or Bloch points, are threedimensional (3D) nonlocal spin textures that are robust to thermal and quantum fluctuations due to their topology 1-4 . Understanding their properties is of both fundamental interest and practical applications 1-9 . However, it has been difficult to experimentally produce topological magnetic monopoles in a controlled manner and directly observe their 3D magnetization vector field and interactions at the nanoscale.Here, we report the creation of 138 stable topological magnetic monopoles at the specific sites of a ferromagnetic meta-lattice at room temperature. We further develop 3D soft xray vector ptychography to determine the magnetization vector and emergent magnetic field of the topological monopoles with a 3D spatial resolution of 10 nm. This spatial resolution is comparable to the magnetic exchange length of transition metals 10 , enabling us to probe monopole-monopole interactions. We find that the topological monopole pairs with positive and negative charges are separated by 18.3±1.6 nm, while the positively and negatively charged pairs are stabilized at comparatively longer distances of 36.1±2.4 nm and 43.1±2.0 nm, respectively. We also observe virtual topological monopoles created by magnetic voids in the meta-lattice. This work demonstrates that ferromagnetic metalattices could be used as a new platform to create and investigate the interactions and dynamics of topological magnetic monopoles. Furthermore, we expect that soft x-ray vector ptychography can be broadly applied to quantitatively image 3D vector fields in magnetic and anisotropic materials at the nanoscale.
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