This paper investigates a new loop design approach of force balance control for the vibratory rate sensor application. The proposed force balance control design takes advantages of the modified automatic gain control configuration in controlling the system's oscillating dynamics at the sense mode. The adapted automatic gain control scheme and force balance strategy, which maintains a constant oscillation magnitude in the sense mode, have several advantages. First it is possible to analyze a complicated nonlinear feedback system using a linear control theory, which resulted in straightforward prediction of closed loop performance. Moreover the control system to achieve the design goals can be implemented using a relatively simple feedback configuration. An application to the vibratory rate sensor using the proposed automatic gain control configuration witnessed that the force balance control can be validated in a practical design process. Experiments using an actual micromachined rate sensor verified the feasibility of the proposed control scheme with demonstration of enhanced performance.
In this paper, it is presented a novel approach for the self-sustained resonant accelerometer design, which takes advantages of an automatic gain control in achieving stabilized oscillation dynamics. Through the proposed system modeling and loop transformation, the feedback controller is designed to maintain uniform oscillation amplitude under dynamic input accelerations. The fabrication process for the mechanical structure is illustrated in brief. Computer simulation and experimental results show the feasibility of the proposed accelerometer design, which is applicable to a control grade inertial sense system.
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