Atomic Force Microscopy (AFM) measurements have been performed for Fe doped SrTiO3 thin films with an Fe concentration of 2 and 5 at%. Thin films with a thickness of about 20 nm were grown by pulsed laser deposition on single crystalline SrTi0.99Nb0.01O3 substrates. Low-energy electron diffraction examination showed that the films are single crystalline. The regions treated with the AFM tip (applied dc voltage up to 6V) showed inhomogeneity of the electrical conductivity.
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