Signal-to-media-noise ratio improvement of CoCrPt -SiO 2 granular perpendicular media by stacked Ru underlayer J. Appl. Phys. 97, 10N119 (2005); 10.1063/1.1855454
Si-O bond structure in slowion deposited SiO2 filmsThe interfacial reactions in the structures of Si/SiO, (500 nm)/Ru (65 nm) (up to 950 "C!) and Si/SiOa (500 nm)/Ru (72 nm)/Al-0.8 wt % Si (630 nm) (up to 700 "C), were studied by Rutherford backscattering spectrometry, Auger electron spectroscopy, x-ray diffractometry, selected-area electron diffraction, energy-dispersive x-ray spectroscopy, scanning electron microscopy, and transmission electron microscopy. A thin film of Ru was stable on a SiO, substrate up to 30 min in a vacuum anneal at 950 'C!. In vacuum, a fast interfacial reaction between the Ru thin film and the Al-Si overlayer started between 550 and 575 "C, resulting in the formation of a Si/SiO,/ RuAls/(Ru,Al,&4l-Si layer sequence. Similar to the reactions between Pt group metals and Al, the Ru/Al reaction is nonuniform. It is controlled by a nucleation mechanism and is accompanied by void formation. 0 1995 American Institute of Physics.
The composition and thickness of etch residues on the base of submicrometer via holes cannot be surmized from data on larger features. Auger sputter depth profiles were used to compare etch residues in 0.55 pm via holes produced by different etch processes and remaining after different cleans. These residues varied significantly in composition and thickness with the processing history of the sample and from those on larger features. A focused ion beam (FIB) sample preparation was developed to expose the bases of via holes and to help reduce sample charging.
Auger depth profiles are used to compare sputtered Ti, reactively sputtered TiN, and TiN/Ti bilayer films in submicron (0.8 and 0.4 μm) contact/via holes, deposited with and without a collimator. Samples were cleaved and mounted to minimize difficulties associated with the sputter profiling of and data acquisition from recessed features. The Ti and N concentrations were calculated with a subtract-and-weight routine which uses dN(E)/d(E) peak-to-peak intensities. Transmission electron microscopy film thicknesses measurements were used to confirm that the sputter rates were comparable for the various sample mounting geometries. The thickness of films deposited on the contact base, relative to those on the surrounding oxide was greater when the collimator was used. For 0.8 μm contacts, the film thickness ratio obtained using the collimator was nearly twice that obtained with the uncollimated deposition (0.5 versus 0.25 for TiN; 0.8 versus 0.6 for Ti). The benefits of the collimator, for obtaining good coverage of the base of the hole, are more pronounced in smaller geometries. For films deposited with the collimated on 0.4 μm contacts the film thickness ratio was ten times that for films deposited without the collimator (0.4 versus 0.05 for TiN, 0.35 versus 0.03 for Ti). There was no evidence of variations in the TiN stoichiometry for films deposited in confined geometries versus the surrounding oxide for either deposition configuration. There was an increase in the depth of surface oxidation for the Ti-only film deposited on the sidewalls using the collimator. Shadowing effects cause an increase in film porosity when the direction of collimated metal flux is parallel to the sample surface. On exposure to atmosphere, this porosity allows oxidation below the surface of the film.
Military subjects participated in a study to evaluate four glove liners worn beneath chemical protective gloves, with regard to sweating of the hands, manual dexterity performance, and perceived comfort in a moderate thermal environment. Although there was a trend for subjects wearing the standard Army liner to experience the lowest sweat rate, the liner effect was not significant due to individual variation. No liner differences were found for manual dexterity performance, hand skin temperature, perceived temperature, and thermal comfort. Differences by liner were found for tactile descriptors used to assess liner comfort. Skin temperature, perceived temperature, and perceived thermal discomfort increased over the duration of the two-hour test, regardless of the liner worn.
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