Investigation of contact and friction at multiple length scales is necessary for the design of surfaces in sliding microelectromechanical system (MEMS). A method is developed to investigate the geometry of summits at different length scales. Analysis of density, height, and curvature of summits on atomic force microscopy (AFM) images of actual silicon MEMS surfaces shows that these properties have a power law relationship with the sampling size used to define a summit, and no welldefined value for any is found, even at the smallest experimentally accessible length scale. This behavior and its similarity to results for fractal Weierstrass-Mandelbrot (W-M) function approximations indicate that a multiscale model is required to properly describe these surfaces. A multiscale contact model is developed to describe the behavior of asperities at different discrete length scales using an elastic single asperity contact description. The contact behavior is shown to be independent of the scaling constant when asperity heights and radii are scaled correctly in the model.
Investigation of contact and friction at multiple length scales is necessary for the design of surfaces in sliding microelectromechanical system (MEMS). A method is developed to investigate the geometry of asperities at different length scales. Analysis of density, height, and curvature of asperities on atomic force microscopy (AFM) images of actual silicon MEMS surfaces show these properties have a power law relationship with the sampling size used to define an asperity. This behavior and its similarity to results for fractal Weierstrass-Mandelbrot (W-M) function approximations indicate that a multiscale model is required to properly describe the surfaces.
A model is presented to investigate contact and friction between sliding microelectromechanical systems (MEMS) surfaces. Roughness of MEMS surfaces exhibits multiscale structure. This was observed with analysis of asperities on atomic force microscope (AFM) images of real MEMS surfaces. The contact model is developed using multiple scales of surface roughness, with a single asperity contact model for the behavior of an asperity at a particular length scale, including effects such as surface forces (adhesion). The roughness information for the model is obtained from the AFM image of the MEMS surface under consideration. Results for true contact area and a prediction of the macroscopic coefficient of friction are discussed.
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