A B-buried layer with a dose of 1×1014 atoms/cm2 was introduced into p-doped Si at a depth of 2.2 μm to enhance copper diffusion via its inherent gettering effect. Copper was then introduced into silicon either via a low-energy implantation followed by a thermal anneal, or through the thermal drive in of physical vapor deposited (PVD) copper film. Secondary ion mass spectrometry depth profiling of both annealed samples later indicated that while substantial amounts of copper was gettered by the B layer in the former sample, no copper was gettered by the B-buried layer in the latter sample. Further analysis with an x-ray diffraction technique showed that copper silicide, Cu3Si was formed in the latter sample. It is thus surmised that the formation of this silicide layer impeded the diffusion of copper towards the B-buried layer. This work investigates the cause of CuSix formation and the underlying reasons for the lower mobility of Cu in PVD Cu film samples.
An effort is made to develop a new 3-component force-moment balance, which is capable of measuring lift force, drag force and pitching moment of a model mounted in the water tunnel. The concept used in the balance design is the bending- beam principle. The forces acting on the spring element cause strains on its surface, which are measured by strain gauges. Since strain yielded by the axial force is usually very small, therefore it is not practical to measure axial force using strain gauge directly to sense the strain in axial direction. The main idea of the new balance design is to translate all desired forces (lift and drag) in such a way that they yield bending strain at selected strain-gauge station. This is done by using a bending balance geometry. Under this apparatus, the model wing is mounted at one of its end to the bending balance. The corresponding Lift, Drag forces and Pitching moment are translated into moments at the other end of the balance, and can be measured from sets of strain gauges in bending mode (twisting mode for pitching moment). Example readings are presented in this paper.
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