The multi-frequency method, recently introduced in atomic force microscopy (AFM), has shown remarkable enhancement of sensitivity and resolution of microscopy with a variety of heterogeneous materials. Under ambient conditions, Kelvin probe force microscopy (KPFM) is commonly carried out using only the first flexural eigenmode of the micro-cantilever probe. Here we report a resonant multi-frequency method for KPFM in air. To implement this method, the first eigenmode of the cantilever probe is used for topography imaging, whereas the second one is used to measure the local contact potential difference in the two-pass mode with the tip lifted. By introducing an additional feedback controller, a multi-frequency KPFM (MF-KPFM) is developed upon a commercial AFM. The performance of MF-KPFM, including the feedback controller, sensitivity and noise, lift height of the cantilever and lateral resolution, is evaluated and optimized. The capabilities of MF-KPFM are demonstrated by characterizing a charge pattern on a polymer electret. The results show that the lateral resolution of KPFM in air can be improved by the resonant multi-frequency method.

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