The TiO 2 nanocrystals were successfully fabricated using an ALD system. The TiN/Al 2 O 3 laminated structure was employed as the starting structure and after appropriate annealing process, the TiN would be oxidized and TiO 2 nanocrystals were formed. Experimental results indicated that the rapid thermal annealing (RTA) temperature was very critical. Also, the thickness of each TiN layer in the TiN/Al 2 O 3 laminated starting structure was also crucial for the TiO 2 nanocrystal formation.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.