This study investigated the aging characteristics of naturally aged primer that uses zirconium (Zr) as a metallic fuel and iron oxide (Fe2O3) as an oxidizer. Naturally aged samples showed a significant reduction in heat of reaction and an increase in activation energy compared to thermally aged samples. The aging processes of a Zr/Fe2O3 pyrotechnic mixture were proposed using X-ray photoelectron spectroscopy. X-ray powder diffraction experiments verified the proposed processes and further confirmed that natural aging promotes the formation of thermally stable monoclinic ZrO2. The oxygen diffusion depth into the Zr surface layer and ZrO2 layer thickness were measured by transmission electron microscopy–energy-dispersive X-ray spectroscopy and fast Fourier transform. The exposure to seasonal humidity during natural aging affected both Zr and Fe2O3 and, in turn, made the mixture more difficult-to-ignite, resulting in the following effects: decrease in heat of reaction, formation of reaction products, and crystal structure growth in the direction of reducing reactivity.
In the process of lithography for semiconductor devices, the disuse of semiconductor devices is caused by the several hundred nanometer size pollutants generated by photochemical reactions, which is called by the haze. Therefore, the real time visual detection system is needed to inspect hazes before the existence of disuse semiconductor devices. We proposed and experimentally confirmed the concept of the real time scanning detection system for the defect on the photo-mask by interference fringes generated between the light wave scattered by small defect on the photo-mask and the reflected light wave from the rest area of the front surface.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.