It is generally recognized that the electron temperature Te either remains constant or decreases slightly with plasma power (plasma density). This trend can be simply verified using a single-step or multi-step fluid global model. In this work, however, we experimentally observed that Te evolved with plasma power in radio frequency (RF) inductively coupled plasmas. In this experiment, the measured electron energy distributions were nearly Maxwellian distribution. In the low RF power regime, Te decreased with increasing plasma power, while it increased with plasma power in the high RF power regime. This evolution of Te could be understood by considering the coupling effect between neutral gas heating and stepwise ionization. Measurement of gas temperature via laser Rayleigh scattering and calculation of Te using the kinetic model, considering both multi-step ionization and gas heating, were in good agreement with the measured value of Te. This result shows that Te is in a stronger dependence on the plasma power.
As collisions between electrons and neutral particles constitute one of the most representative physical phenomena in weakly ionized plasma, the electron-neutral (e-n) collision frequency is a very important plasma parameter as regards understanding the physics of this material. In this paper, we measured the e-n collision frequency in the plasma using a calibrated cutoff-probe. A highly accurate reactance spectrum of the plasma/cutoff-probe system, which is expected based on previous cutoff-probe circuit simulations [Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], is obtained using the calibrated cutoff-probe method, and the e-n collision frequency is calculated based on the cutoff-probe circuit model together with the high-frequency conductance model. The measured e-n collision frequency (by the calibrated cutoff-probe method) is compared and analyzed with that obtained using a Langmuir probe, with the latter being calculated from the measured electron-energy distribution functions, in wide range of gas pressure.
We present observations of large‐amplitude (δB/B∼ 0.01) oblique whistler wave pulses generated by a spontaneous, 3‐D localized magnetic reconnection event in the Caltech jet experiment. The wave pulses are measured more than 50 ion skin depths from the reconnection location by a tetrahedron array of three‐axis B‐dot probes that mimic the pyramid flight formations of the Cluster and Magnetospheric Multiscale Mission spacecraft. Measurements of background parameters, wave polarization, and wave dispersion confirm that the pulses are whistler modes. These results demonstrate that localized impulsive reconnection events can generate large‐amplitude, oblique whistler wave pulses that propagate far outside the reconnection region. This provides a new pathway for the generation of magnetospheric whistler pulses and may help explain relativistic particle acceleration in phenomena such as solar flares that incorporate 3‐D localized impulsive magnetic reconnection.
This paper proposes a new measurement method of electron density using the reactance spectrum of the plasma in the cutoff probe system instead of the transmission spectrum. The highly accurate reactance spectrum of the plasma-cutoff probe system, as expected from previous circuit simulations [Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], was measured using the full two-port error correction and automatic port extension methods of the network analyzer. The electron density can be obtained from the analysis of the measured reactance spectrum, based on circuit modeling. According to the circuit simulation results, the reactance cutoff probe can measure the electron density more precisely than the previous cutoff probe at low densities or at higher pressure. The obtained results for the electron density are presented and discussed for a wide range of experimental conditions, and this method is compared with previous methods (a cutoff probe using the transmission spectrum and a single Langmuir probe).
Since a plasma processing control based on plasma diagnostics attracted considerable attention in industry, the reproducibility of the diagnostics using in this application has become a great interest. Because the cutoff probe is one of the potential candidates for this application, knowing the reproducibility of the cutoff probe measurement becomes quit important in the cutoff probe application research. To test the reproducibility of the cutoff probe measurement, in this paper, a comparative study among the different cutoff probe measurements was performed. The comparative study revealed remarkable result: the cutoff probe has a great reproducibility for the electron density measurement, i.e., there are little differences among measurements by different probes made by different experimenters. The discussion including the reason for the result was addressed via this paper by using a basic measurement principle of cutoff probe and a comparative experiment with Langmuir probe.
An interferometer is a useful diagnostic tool for measuring line-averaged electron density but is limited in its use because it generally measures at a fixed location. We report here a spatially translatable fiber-coupled interferometer that measures the density of a high-speed MHD-driven plasma jet colliding with a target cloud. The interferometer uses a He-Ne laser coupled to a polarization-maintaining single mode optical fiber having a vacuum feedthrough. The interferometer provides a measure of the spatial-temporal profile of the line-averaged electron density from which the change in jet velocity as a result of its collision with the target cloud can be deduced.
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