The electrostatic bonding of silicon and Pyrex glass was studied in order to find out the influence of process parameters on the final result and to be able to optimize the process with regard to the fabrication of silicon sensors. The most important parameters are the temperature and the voltage. The main criterion used for the optimization of their values was the induced stress in the silicon part of the bonded ensemble. It was found that a temperature of 360% and voltages in the range 750-1000 V are suitable.

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Evoked urethral and anal responses are produced by electrical stimulation of penis, bladder neck and anus. Latency and duration of the responses after bladder neck and anal stimulation are greatly dependent on stimulus parameters, suggesting a polysynaptic reflex; penile stimulation probably involves an oligosynaptic pathway. In pathological conditions the responses are delayed and their duration reduced.

Broadband dielectric spectroscopy measurements of biological materials within RF/microwave range can reveal cellular information, which is of important value in biological and medical researches. Here we present a platform that combines a miniaturized coplanar waveguide (CPW) transmission line (TL) sensor and a special CPW fed interdigitated capacitor (IDC), which allows us to measure the complex permittivity of cell cultures from 300 kHz to 50 GHz. The CPW-TL sensor and the CPW-IDC sensor are integrated with an SU-8 microfluidic channel, enabling measurements of microliter or even nano-liter volumes of liquids and suspensions. Due to the accurate alignment of the SU-8 polymer and the reliable lift-off fabrication procedure, we are able to minimize the measurement errors caused by the sensors' dimension tolerance. To ensure accurate complex permittivity extraction of the tested material, related calibrations and de-embedding processes are explained. With the measurement of deionized water as a validation, the platform is used to measure the complex permittivity of both a yeast cell culture and a mammalian cell culture. We elaborate on the interesting findings and discuss future possibilities.