We realized in this study RF capacitors of PZT, STO and SiO 2 integrated on Si substrate. An RLC series model fits well with the electrical results of the MIM capacitors at RF frequencies. A comparison between RF and LF measurements shows that STO and PZT exhibit a little decrease (10% max) of the dielectric constant at GHz frequencies. One field of application of these capacitors can be decoupling capacitors.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.