TiO2, SiO2 and TiO2-SiO2 thin films were prepared by sol-gel dipping method on glass substrates. The pyrolysis behavior of TiO2 and SiO2 dry gel were tested by differential thermal analysis (DTA). The microstructure and optical properties of the TiO2, SiO2 and TiO2- SiO2 were studied by X-ray diffraction (XRD) and ultraviolet and visible spectrophotometer. The results showed that the phase structure of the films was affected by the composition. All the films were transparent in the visible region. Meanwhile, the transparency of SiO2 was better than TiO2 and TiO2-SiO2 composite film. The ban-gap of the TiO2, SiO2 and TiO2-SiO2 thin films were 3.79, 4.01 and 3.91.
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