Small and directional sensitive silicon based sensors for velocity measurements have been designed and fabricated using microelectronic technology. Single-chip as well as double-chip sensors for the determination of mean velocity and turbulent stresses have been developed. To determine the performance of these silicon sensors, comparisons with conventional hot-wire sensors were done in a well-defined two-dimensional turbulent fiat plate boundary layer at a constant Reynolds number of 4.2 9 10 6. All the silicon sensors were found to have a spatial and frequency resolution that makes them suitable for turbulence measurements. In the studied flow field the measured profiles of mean velocities and Reynolds stresses of all silicon sensors show the same accuracy as corresponding hot-wire measurements. The silicon sensors are also shown to operate with good resolution even when the temperature of the heated part of the chip is reduced considerably,
A very small and highly sensitive flow velocity sensor has been designed and fabricated using silicon microelectronic technology. To determine the performance of this silicon sensor, comparisons with a conventional hot-wire sensor were made in a well defined two-dimensional turbulent flat-plate boundary layer at a constant Reynolds number of 4.2*106. The silicon sensor was found to have spatial and frequency resolutions that make it suitable for turbulence measurements. In the investigated flow field the new silicon sensor measures profiles of the mean velocity and the turbulence intensity with the same accuracy as the hot wire.
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