Technologies based on non-equilibrium, low-temperature plasmas are ubiquitous in today’s society. Plasma modeling plays an essential role in their understanding, development and optimization. An accurate description of electron and ion collisions with neutrals and their transport is required to correctly describe plasma properties as a function of external parameters. LXCat is an open-access, web-based platform for storing, exchanging and manipulating data needed for modeling the electron and ion components of non-equilibrium, low-temperature plasmas. The data types supported by LXCat are electron- and ion-scattering cross-sections with neutrals (total and differential), interaction potentials, oscillator strengths, and electron- and ion-swarm/transport parameters. Online tools allow users to identify and compare the data through plotting routines, and use the data to generate swarm parameters and reaction rates with the integrated electron Boltzmann solver. In this review, the historical evolution of the project and some perspectives on its future are discussed together with a tutorial review for using data from LXCat.
An ultra-thin phase-change bridge (PCB) memory cell, implemented with doped GeSb, is shown with <100µA RESET current. The device concept provides for simplified scaling to small crosssectional area (60nm 2 ) through ultra-thin (3nm) films; the doped GeSb phase-change material offers the potential for both fast crystallization and good data retention.
Electron sheaths are commonly found near Langmuir probes collecting the electron saturation current. The common assumption is that the probe collects the random flux of electrons incident on the sheath, which tacitly implies that there is no electron presheath and that the flux collected is due to a velocity space truncation of the electron velocity distribution function (EVDF). This work provides a dedicated theory of electron sheaths, which suggests that they are not so simple. Motivated by EVDFs observed in ParticleIn-Cell (PIC) simulations, a 1D model for the electron sheath and presheath is developed. In the model, under low temperature plasma conditions (T e T i ), an electron pressure gradient accelerates electrons in the presheath to a flow velocity that exceeds the electron thermal speed at the sheath edge. This pressure gradient generates large flow velocities compared to what would be generated by ballistic motion in response to the electric field. It is found that in many situations, under common plasma conditions, the electron presheath extends much further into the plasma than an analogous ion presheath. PIC simulations reveal that the ion density in the electron presheath is determined by a flow around the electron sheath and that this flow is due to 2D aspects of the sheath geometry. Simulations also indicate the presence of ion acoustic waves excited by the differential flow between electrons and ions in the presheath which result in sheath edge fluctuations. The 1D model and time averaged PIC simulations are compared and it is shown that the model provides a good description of the electron sheath and presheath.
Biased electrodes are common components of plasma sources and diagnostics. The plasma-electrode interaction is mediated by an intervening sheath structure that influences properties of the electrons and ions contacting the electrode surface, as well as how the electrode influences properties of the bulk plasma. A rich variety of sheath structures have been observed, including ion sheaths, electron sheaths, double sheaths, double layers, anode glow, and fireballs. These represent complex self-organized responses of the plasma that depend not only on the local influence of the electrode, but also on the global properties of the plasma and the other boundaries that it is in contact with. This review summarizes recent advances in understanding the conditions under which each type of sheath forms, what the basic stability criteria and steady-state properties of each are, and the ways in which each can influence plasma-boundary interactions and bulk plasma properties. These results may be of interest to a number of application areas where biased electrodes are used, including diagnostics, plasma modification of materials, plasma sources, electric propulsion, and the interaction of plasmas with objects in space.
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