Sensor fabrication for microrobots is challenging due to their small size and low mass. As a potential solution, we present a technique for estimating the velocity of piezoelectric bending bimorph actuators, a popular choice for driving such microscale devices, that requires simple electronics and no additional mechanical components. Our approach relies on the insight that motion of the actuators causes varying strains on the surface on the piezoelectric material, which via the direct piezoelectric effect, results in a current proportional to the actuator velocity. We propose that the actuator be electrically approximated as a parallel combination of a frequency and voltage dependent resistor and capacitor, and a velocity proportional current source. We develop an experimental procedure to measure these quantities, and are able to experimentally determine the actuator tip velocity to within 10% accuracy over a range of voltages (25–200 V) and frequencies (1–2000 Hz, well beyond actuator resonance). We successfully apply this sensing methodology to two microrobots, the RoboBee and the Harvard Ambulatory MicroRobot (HAMR), to estimate the wing and limb motion respectively. We further use sensor feedback to close the loop on HAMR’s leg phase and obtain desired leg trajectories near transmission resonance. The proposed sensor methodology is generic and can be applied to piezoelectric actuators of different geometries and configurations for uses in microrobotic applications.
This study demonstrates that the rate of TSA is rapidly increasing in the US, with over a four-fold increase in revisions and five-fold increase in primaries over the ten years studied.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.